Stress Measurements and Optical Studies of (AsSe)100−xAgx Films for Optical Sensor Applications

Thin (AsSe)100–xAgx (x = 0–25 mol.%) films have been deposited on glass substrates and silicon cantilevers by vacuum thermal evaporation from the corresponding bulk materials. The mechanical stability was investigated by measuring the stress of the films deposited on silicon cantilevers. The correlation between the stress and the composition has been investigated and will be discussed.