Global dynamics and integrity of a micro-plate pressure sensor

Abstract This paper investigates the complex bifurcation scenario of electrically-actuated circular micro-plates subjected to differential pressure. Our analysis deals with the primary, secondary and ultimate saddle-node bifurcation points responsible for the device snap-through and addresses the pressure range in which the robustness of the two main stable configurations is undermined by minor coexisting attractors. By making use of basins of attraction and integrity profiles, safe dynamical regions of motion are evaluated with respect to the applied DC voltage. It is found that period-doubling bifurcations are accountable for a sensible reduction in the dynamical integrity, small variations of the DC voltage largely modify the response of the pressure sensor.