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High Contact-Resistance from Oxygen in Embedding ILD: An Investigation by TEM PEELS
High Contact-Resistance from Oxygen in Embedding ILD: An Investigation by TEM PEELS
2007
Wentao Qin
A Donovan
D Heleotes
A Elkin
M Vadipour
N Lerner
P. Fejes
D. Theodore
Keywords:
Metallurgy
Oxygen
Embedding
Contact resistance
Materials science
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