Novel SCR structure for power supply protection in FinFET technology
2017
A FinFET SCR embedded ESD clamp for power supply protection with low leakage current is demonstrated. The proposed clamp is suitable for low power applications since it reduces ∼87% of leakage current per bigFET width and improves ESD robustness to ∼2X per footprint compared to the conventional RC-triggered clamp.
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