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Monitoring of Heavy Metals in As‐Implanted Simox with Surface Photovoltage
Monitoring of Heavy Metals in As‐Implanted Simox with Surface Photovoltage
1990
L. Jastrzebski
G.W. Cullen
R. Soydan
Keywords:
Chemistry
Analytical chemistry
Inorganic chemistry
Heavy metals
Oxygen
Leakage (electronics)
Ion implantation
Surface photovoltage
Mass spectrometry
Arsenic
Oxygene
Correction
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