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A Study of 65nm Silicon Etch
A Study of 65nm Silicon Etch
2010
Linlin Zhao
Yi Huang
Baodong Han
Haiyang Zhang
Qiuhua Han
Shih-Mou Chang
Keywords:
Etch pit density
Buffered oxide etch
LOCOS
Silicon
Inorganic chemistry
Materials science
Optoelectronics
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