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(Invited) Water Transport Along Si/Si Direct Wafer Bonding Interfaces
(Invited) Water Transport Along Si/Si Direct Wafer Bonding Interfaces
2018
F. Rieutord
Samuel Tardif
Ivan Nikitskiy
Frank Fournel
Marwan Tedjini
Vincent Larrey
Claudine Bridoux
Christophe Morales
Didier Landru
Oleg Kononchuk
Keywords:
Wafer bonding
Composite material
Materials science
Optoelectronics
water transport
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