Surface deformation of single crystalline copper on different nano-scratching paths

Anisotropic deformation behavior of single crystalline material under scratching has a significant effect on machining precision in nano-mechanical machining. In the present work, a crystal plasticity finite element model simulating the scratching process is developed, and the established model is validated by comparison with experimental results. (001)-, (101)- and (111)-oriented coppers are selected to investigate the deformation behavior including scratching depth, surface topography and subsurface deformation affected by scratching path. Further, the deformation mechanisms of (001)-, (101)- and (111)-oriented coppers are analyzed to be caused by deformation of slip systems.