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Development and basic performance measurement of atmospheric shower head type multi-gas plasma source
Development and basic performance measurement of atmospheric shower head type multi-gas plasma source
2021
Tsuyoshi Noguchi
Kenichi Yamazaki
Yuma Suenaga
Akitoshi Okino
Keywords:
Head (vessel)
gas plasma
Materials science
Atmospheric-pressure plasma
Optics
Shower
Dielectric barrier discharge
Correction
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