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Mist chemical vapor deposition of flexible and epitaxial wide-bandgap oxide semiconductors on synthetic mica
Mist chemical vapor deposition of flexible and epitaxial wide-bandgap oxide semiconductors on synthetic mica
2020
Yuta Arata
Hiroyuki Nishinaka
Kazuki Shimazoe
Daisuke Tahara
Masahiro Yoshimoto
Keywords:
oxide semiconductor
Materials science
Chemical vapor deposition
Optoelectronics
Mica
Epitaxy
Mist
Band gap
Correction
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