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SiO 2 microstructure evolution during plasma deposition analyzed via ellipsometric porosimetry
SiO 2 microstructure evolution during plasma deposition analyzed via ellipsometric porosimetry
2019
Rahel Buschhaus
Achim von Keudell
Keywords:
Microstructure
Analytical chemistry
Deposition (law)
Materials science
Porosimetry
Plasma
Polymerization
plasma deposition
Correction
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