A practical microgripper by fine alignment, eutectic bonding and SMA actuation

Abstract A microgripper with a large gripping force, a relatively rigid structural body, and flexibility in functional design is presented. The actuation is generated by NiTiCu shape memory alloy (SMA) films and the stress induced can deflect each side of the microgripper up to 55 μm for a total gripping motion of 110 μm. When fully open, the force exerted by the film corresponds to a 13 mN gripping force on the tip of the gripper.