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Effects of Texture Structure on Crystalline Damage Induced by SiNx Plasma CVD
Effects of Texture Structure on Crystalline Damage Induced by SiNx Plasma CVD
2014
Yoshio Ohshita
Atsushi Ogura
K. Nagata
H. Tokutake
Norihiro Ikeno
Y. Yamashita
Daisuke Takai
T. Tachibana
Keywords:
Plasma
Crystalline silicon
Crystal
Ceramic materials
Materials science
Composite material
Correction
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