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PLANAR MOVPE TECHNOLOGY FOR EPITAXY OF III-NITRIDE MATERIALS
PLANAR MOVPE TECHNOLOGY FOR EPITAXY OF III-NITRIDE MATERIALS
2006
Martin Dauelsberg
Bernd Schineller
Johannes Kaeppeler
Keywords:
Metalorganic vapour phase epitaxy
Nitride
Epitaxy
Inorganic chemistry
Materials science
Optoelectronics
Planar
Correction
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