A Study on control of curvature of multilayer by sputter deposition

Takuma Nakamura,Nobuyuki Kobayashi,Osamu Mori,Yoji Shirasawa,Junji Kikuchi,Yuki Teramoto,takuma   nakamura,nobuyuki   kobayasi,youzi   sirasawa,hayabusa hitosi   kikuti,yuuki   teramoto

A Study on control of curvature of multilayer by sputter deposition

2015

Takuma Nakamura
Nobuyuki Kobayashi
Osamu Mori
Yoji Shirasawa
Junji Kikuchi
Yuki Teramoto
takuma nakamura
nobuyuki kobayasi
youzi sirasawa
hayabusa hitosi kikuti
yuuki teramoto

Meeting Information: The 26th Workshop on JAXA Astrodynamics and Flight Mechanics　2016 (July 25-26, 2016. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (JAXA)(ISAS)), Sagamihara, Kanagawa Japan

Keywords:

Sputter deposition
Curvature
Aerospace
Astronautics
Engineering
Mechanical engineering
Nanotechnology

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