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Guest editorial special section on issues related to semiconductor manufacturing at technology nodes below 70 nm
Guest editorial special section on issues related to semiconductor manufacturing at technology nodes below 70 nm
2002
R. Singh
R. R. Doering
H. Koike
Kinam Kim
M. Heyns
Keywords:
Electronic engineering
Metrology
Semiconductor device fabrication
Materials science
Capacitor
CMOS
Silicon on insulator
Electrical engineering
special section
Voltage
random access memory
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