Effect of dopant concentration and deposition time on the properties of fluorine-doped tin oxide (FTO) film deposited via spray pyrolysis

Fluorine-doped tin oxide (FTO) films with the preferred (110) orientation have been successfully fabricated on glass via spray pyrolysis. Dopant concentration has been found to affect the sheet resistance of the FTO film significantly, where the optimum condition was obtained using 20% fluorine deposited at 500 0C for 1 minute with sheet resistance of 37.37 Ω/sq and transmittance of 88.7%. Increasing the deposition time to 3 minutes further decreased the sheet resistance to 30 Ω/sq. On the other hand, % transmittance has generally increased to 93.7% for 5 minutes deposition time.