Hydrogen in Be-doped GaInAsP lattice matched to InP: diffusion and interactions with dopants

GaxIn1-xAsyP1-y has been exposed to hydrogen and deuterium plasma. The deuterium diffusion has been measured by secondary ion mass spectroscopy. The profiles show that two different species or two different mechanisms are involved in the diffusion. They also reveal that deuterium (or hydrogen) interacts strongly with the Be acceptors. This is confirmed by electronic transport measurements which demonstrate the passivation of the electrical activity of Be by hydrogen which leads, for intermediate doping levels, to samples turning to n-type after hydrogenation. Finally, the effects of hydrogen on the photoluminescence spectra are also presented and discussed.