Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride

In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated successfully in 150 mm SOI technology. A large tilt angle is achieved by FEM-based optimization of the lever arm parameters. Three micromirror types with varied spring widths are characterized, achieving tilt angles up to 51.3° at 1.9 kHz, 31.6° at 4.6 kHz, and 16.5° at 12.5 kHz for an actuation voltage of less than 5 V. For higher actuation voltages up to 20 V, a maximum scan angle of 104.9° is reached, limited by the measurement setup.