Key Issues in Magnetic Micro-electro-mechanical-systems (MMEMS)

Magnetic micro-electro-mechanical-systems (MMEMS) are developed based on conventional MEMS with great potential for science and applications. The compatibility of magnetic materials with MEMS technologies as a key issue has been addressed. In this article, we will present an overview of key issues of the MMEMS technology, such as coil fabrication, soft magnetic films and hard magnetic films fabrication.