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Ion implantation arrangement with control of intercepting disk-oberflaechenpotentials
Ion implantation arrangement with control of intercepting disk-oberflaechenpotentials
1978
John Lawrence Forneris
William Wallace Hicks
John Howard Keller
Charles Michael Mckenna
James Anthony Siermarco
Wolfgang Mueller
Keywords:
Atomic physics
Ion implantation
Materials science
Optoelectronics
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