High-resolution periodical structure on polycarbonate using holographic interferometry and electroforming process

A procedure for prototyping a periodic structure on polycarbonate at submicron order using holographic interferometry and electroplating metal molding processes is demonstrated. The holographic interference using a He-Cd (325nm) laser was first used to create periodic line structure on an i-line sub-micron positive photoresist film. Pattern was then transferred to a metal mold using Nickel-Cobalt electroforming. Final line pattern on a polycarbonate thin film was formed from the metal mold using a hot press machine. The technique allows for accurate control for the transfer of a grating period and depth. The grating pattern on the polycarbonate polymer produced by the metal mold gives an average error of less than 1.7% in the grating period and an average error of 5.7% for depth reproduction.