Tailoring the properties of 2D transition metal dichalcogenides by ALD

Two-dimensional transition metal dichalcogenides (2D-TMDs) are an exciting class of new materials. Their ultrathin body, optical band gap and unusual spin and valley polarization physics make them very promising candidates for a vast new range of (opto-)electronics and catalysis applications. So far, most experimental work on 2D-TMDs has been performed on exfoliated flakes made by the ‘Scotch tape’ technique. The major next challenge is the large-area synthesis of 2D-TMDs with control over their properties by a technique that ultimately can be used in industry. This article will focus on ALD for large-area 2D-TMD synthesis for application in (opto-)electronics and catalysis and will highlight the precise control over the thickness, morphology, composition and phase of the 2D-TMDs that can be obtained by ALD.