Laser system and the laser annealing apparatus
2015
The laser system, the laser system is a source of laser annealing apparatus irradiating a pulsed laser beam to a workpiece, a laser device for generating a pulsed laser beam, the pulse time waveform variable for varying the pulse time waveform of the pulse laser beam a device receives the pulse time waveform generation parameters from the laser annealing apparatus, and a control unit for controlling the pulse time waveform varying device may be provided.
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