Plasma-enhanced chemical vapour deposition of TiO2/polymer composite layers

Injection of titanium tetraisopropoxide {Ti[OCH(CH3)2]4} monomer into a glow discharge results in the deposition of TiO2moieties dispersed throughout a polymeric matrix. These layers have been characterized by X-ray photoelectron spectroscopy (XPS) and infrared spectroscopy. It is has been found that a wide range of TiO2/polymer composite stoichiometries can be obtained by simply varying the glow discharge parameters.