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THERMALLY INDUCED MICRO-DEFECTS IN CZ SILICON: A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.
THERMALLY INDUCED MICRO-DEFECTS IN CZ SILICON: A HIGH RESOLUTION ELECTRON MICROSCOPY STUDY.
1983
Fernando Ponce
S. Hahn
T. Yamashita
Michael C. Scott
J. R. Carruthers
Keywords:
Analytical chemistry
Electron microscope
Silicon
Materials science
Optoelectronics
micro defects
cz silicon
Correction
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