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Elimination of stress induced silicon defects in very high density SRAM structures
Elimination of stress induced silicon defects in very high density SRAM structures
2001
P. Ferreira
R. A. Bianchi
F. Guyader
R. Pantel
E. Granger
Keywords:
Leakage (electronics)
Electronic engineering
Analytical chemistry
Materials science
Static random-access memory
Microelectronics
Rapid thermal processing
Silicon
stress induced
high density
Fabrication
Correction
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