Raman spectroscopy inspection procedures

2014 
Embodiments of the invention provide a Raman spectroscopic inspection method comprising the steps of: successively measuring to collect a plurality of Raman spectroscopy signals of a Raman spectrum of an object to be inspected; Superimposing the plurality of Raman spectroscopic signals in order to form a beat signal; Filtering a fluorescence interference signal from the beat signal; and identifying the object to be inspected on the basis of the beat signal from which the interference signal has been filtered fluorescence. Using the procedure described above can be obtained a desired Raman spectroscopic signal by the interference, which is caused by the fluorescence signal, is removed from a Raman spectroscopic inspection signal of the object. It can inspect the properties of the Raman spectrum of the object properly to identify the object efficiently.
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