Lifetime Estimation of Intrinsic Silicon Nitride MIM Capacitors in a GaN MMIC Process

We have studied the reliability of intrinsic SiN MIM capacitors designed for 48 V and 125 0 C operation and manufactured in a GaN process flow. It is shown that very small area capacitors (10um x 10um) with a dielectric thickness of 400nm exhibit lifetimes as long as 1.48E10 hours under such conditions.