Simulations and Experiment Analysis of a Piezoelectric Micropump

The application of micropump in microanalytical reagent is widely. In this paper a piezoelectric micropump model that looks like a sandwitch has been put forward. The main structures of the micropump include inlet and outlet pipe, silicon substrate pump body, piezoelectric transducer. In order to find the excellent driving performance, the modals and piezoelectric-stress coupling analysis of the piezoelectric transducer has been carried out with finite element analysis methods. The result proves that the optimal working condition of the micropump is the 1st mode. Finally the micropump model has been fabricated with silicon deep reactive ion etching and UV irreversible irradiation. Through experiment the flow rate and pressure of the micropump reach the maximum in first-order modal that is less than 1000 Hz, and this is accord with the modal analysis.