A Schottky Diode Multiplier Chain based on Three-dimensional Stacking Integration at 410GHz to 510GHz

The research introduced the integration technology of three-Dimensional stacked terahertz transmitter link based on schottky diode multiplier at 410GHz to 510GHz. In the multiplier chain, there are five stages: the E-band multiplier, E band drive amplifier, D-band doubler and antenna. Firstly, the five different parts have been designed separately. Secondly, the different stage has been designed onto different layers, and the transmission direction has been changed to vertical direction from horizontal direction. Finally, the 3D stacked terahertz transmitter has been finished, and it is smaller than the separate modules with the similarly results. The final size changed from 110mm to 13mm, and the performance is similar to the chain based on discrete modules, which is better than 50uW.