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Development of a thinned, backside-illuminated charge-coupled device imager
Development of a thinned, backside-illuminated charge-coupled device imager
1973
S.R. Shortes
W. W. Chan
W.C. Rhines
J.B. Barton
D. R. Collins
Keywords:
Optoelectronics
Charge-coupled device
Electronic engineering
Physics
Tin
Image resolution
Fabrication
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