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Characterization of Low Pressure Chemical-Vapor-Deposited Titanium Nitride from Metalorganic Sources
Characterization of Low Pressure Chemical-Vapor-Deposited Titanium Nitride from Metalorganic Sources
1994
Shichang Sun
Mitchell Tsai
Keywords:
Materials science
Metallurgy
Electronic engineering
Titanium nitride
Titanium
Nitride
Ceramic materials
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