Efficient gas phase polymer deposition by infrared laser-photosensitized decomposition of 4-silaspiro[3.4]octane

Abstract Laser-induced thermolysis of 4-silaspiro[3.4]octane is an efficient method for the gas phase deposition of organosilicon polymer, which is assumed to arise from 1-methylene-1-silacyclopentane generated upon the elimination of ethene from the parent molecule.