Methods for processing complex three-dimensional micro-nano structure in nanoscratching mode through AFM probe

The invention discloses methods for processing a complex three-dimensional micro-nano structure in a nanoscratching mode through an AFM probe, and belongs to the field of micro-nano structure processing. In order to achieve processing of the complex three-dimensional micro-nano structure, a device comprises an AFM, an X-direction precise working table and a Y-direction precise working table. A base of the X-direction precise working table is fixedly connected to a sliding block of the Y-direction precise working table, a sliding block of the X-direction precise working table performs X-direction movement, a base of the Y-direction precise working table is fixedly connected to an AFM sample table, and the sliding block of the Y-direction precise working table performs Y-direction movement. According to the three methods, due to different control and parameter settings of one commercial AFM and one high-precision positioning platform system, the complex three-dimensional micro-nano structure is processed through the AFM probe with the nanoscratching technology. By means of the methods, the processing of the complex three-dimensional micro-nano structure can be achieved with low cost, the methods are simple, and device cost and processing achieving cost are low.