Pressure Gradient Control and Energy-saving Operation Strategy Study on a Multi-zone Cleanroom☆

Abstract Pressure gradient control is an effective technical measure to prevent the external pollution and cross-contamination from different clean areas of a multi-zone cleanroom, which played a key role for the quality control of cleanroom. In this paper, modelling analysis combined with experimental investigations conducted on a multi-zone cleanroom experimental platform. A series of investigations were conducted on the experimental platform with supply air volume variation by electronic frequency conversion on air-supply fan unit. The characteristics of cleanroom such as cleanliness, ventilation rate, pressure gradient were all measured. An energy-saving operation strategy for multi-zone cleanroom has been gained. Experimental investigations proved that the determined principle of pressure gradient setting is feasible for reliable and energy-saving operation. It is also proved through experiments that about 24.5% energy consumption decreased when adopted the operation strategy.