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Plasma enhanced atomic layer deposition of Ga2O3 thin films (vol 2, pg 19232, 2014)
Plasma enhanced atomic layer deposition of Ga2O3 thin films (vol 2, pg 19232, 2014)
2015
Ranjith Karuparambil Ramachandran
Jolien Dendooven
Jonas Botterman
Sreeprasanth Pulinthanathu Sree
Dirk Poelman
Johan A. Martens
Hilde Poelman
Christophe Detavernier
Keywords:
Radiochemistry
Thin film
Atomic layer deposition
Plasma
Materials science
Analytical chemistry
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