Velocity boundary conditions for positive ions entering radio-frequency sheaths in electronegative plasmas

Under certain conditions in radio-frequency (rf) plasmas, the amplitude of the low-energy peak in ion energy distributions (IEDs) measured at an electrode depends sensitively on the velocity at which ions approach the sheath. By measuring IEDs, incident ion velocities can be determined. Here, IEDs were measured in inductively coupled plasmas in 1.3 Pa of CF4, at rf sheath voltages up to 100 V at 1 MHz, obtained by biasing a counterelectrode. From measured IEDs and sheath voltages, we determined the incident velocities of all significant positive ions: CF3+, CF2+, CF+, and F+. At higher bias voltages, we detected essentially the same velocity for all four ions, suggesting that some collisional process keeps different ions at the same velocity as they emerge from the presheath. For all four ions, measured velocities were significantly lower than the Bohm velocity uB and the electropositive ion sound speed cs, because of negative ion effects. From the measured velocities, an upper bound for negative ion temp...