1.1 THz U-Silicon-On-Glass (U-SOG) Waveguide: A Low-Loss Platform for THz High-Density Integrated Circuits

A U-shaped silicon-on-glass (U-SOG) dielectric waveguide, operating at THz frequencies, is proposed here for the first time. The modal analysis results for a single-mode U-SOG waveguide are also presented. The U-SOG waveguide is fabricated using micromachining system that allows for low-cost and high-precision manufacturing. Measurement results show that the U-SOG waveguide achieves an attenuation constant as low as 0.026 dB/ λ g (on average) over the frequency range of 0.9–1.08 THz. This measured attenuation is among the lowest reported for THz waveguides in the literature. The proposed U-SOG waveguide is a strong candidate for low-loss and low-cost THz high-density integrated systems.