Low drift MEMS humidity sensor by intermittent heating

Polymer capacitive humidity sensor with micro heater was fabricated by MEMS (Micro Electro Mechanical Systems) technique. The most suitable input power which can achieve high precision and the low consumption was found. It was demonstrated that intermittent heating of humidity sensitive material reduced the drift at high humidity. This MEMS humidity sensor would be a technology suitable for the applications which require the precision in high humidity with small size and low power consumption.