Cross-type submicron Josephson junctions using SNS technology for Josephson voltage standard applications

We have developed a very simple method for manufacturing submicrometer Josephson junctions (JJs) based on niobium and titanium layers. Together with the use of a microwave circuit consisting of modified coplanar strips this type of JJs offers the possibility of easy integration of several thousand submicrometer junctions in a microwave circuit. Up to this point we have manufactured and successfully tested arrays with 2000 super-/normal-/super-conductor junctions with areas from 0.3 /spl mu/m/spl times/0.3 /spl mu/m to 2.0 /spl mu/m/spl times/2.0 /spl mu/m. First measurements with microwave irradiation showed stable Shapiro steps at voltages up to 40 mV and, thereby, the proper operation of all 2,000 junctions was seen.