Reflectivities of chemical vapor deposition‐diamond mirrors in the vacuum ultraviolet region

Diamond mirrors have been fabricated by depositing a diamond thin film on a Si3N4 substrate by means of chemical vapor deposition (CVD). The reflectivities of the CVD diamond mirrors in the vacuum ultraviolet region from 30 to 2000 A are reported and compared with those of SiC and gold‐coated SiC mirrors measured in this work. The optical constants of the CVD diamond film are obtained from the reflectivities measured and also compared with those of a bulk crystal reported in the literature.