Large Area Atomically Flat Surfaces via Exfoliation of Bulk Bi2Se3 Single Crystals

In this work, we present an exfoliation method that produces cm2-area atomically flat surfaces from bulk layered single crystals, with broad applications such as for the formation of lateral heterostructures and for use as substrates for van der Waals epitaxy. Single crystals of Bi2Se3 were grown using the Bridgman method and examined with X-ray reciprocal space maps, Auger spectroscopy, low-energy electron diffraction, and X-ray photoelectron spectroscopy. An indium-bonding exfoliation technique was developed that produces multiple ∼100 μm thick atomically flat, macroscopic (>1 cm2) slabs from each Bi2Se3 source crystal. Two-dimensional X-ray diffraction and reciprocal space maps confirm the high crystalline quality of the exfoliated surfaces. Atomic force microscopy reveals that the exfoliated surfaces have an average root-mean-square (RMS) roughness of ∼0.04 nm across 400 μm2 scans and an average terrace width of 70 μm between step edges. First-principles calculations reveal exfoliation energies of Bi2...