Old Web
English
Sign In
Acemap
>
Paper
>
Estimation of silicon wafer coating thickness using ultrasound generated by femtosecond laser
Estimation of silicon wafer coating thickness using ultrasound generated by femtosecond laser
2020
Peipei Liu
Kiyoon Yi
Hoon Sohn
Keywords:
Optoelectronics
Wafer
Ultrasound
Coating
Femtosecond
Laser
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
33
References
4
Citations
NaN
KQI
[]