The method for manufacturing a graphene wiring structure and graphene wiring structure

【Task】 Embodiment provides a method for manufacturing a graphene wiring structure and graphene wiring structure of a fine width. Graphene wiring structure A embodiment includes a substrate 1, a metal portion 2 on the substrate 1, a multilayered graphene 3 connected to the metal portion 2, a first insulating film 4 on the substrate 1, the upper substrate 1 in a second insulating film 5, the metal portion 2, a first insulating film 4 exists between the second insulating film 5, the edge of the multilayer graphene 3 is connected to the metal part 2, the first insulating and vertical sides with respect to the substrate film 4, the side surface of the direction perpendicular to the substrate 1 of the second insulating film 5 faces, one of the first outer surface 3A of the multilayer graphene 3, the substrate 1 of the first insulating film 4 first and sides 4A and physically connected in the vertical direction, the other second outer face 3B of the multi-layer graphene is connected to the second side surface 5A and physically in the direction perpendicular to the substrate 1 of the second insulating film 5. .FIELD 1