Gas guide assembly in a vacuum coating plant with an elongated magnetron

Gas guide assembly in a vacuum coating system having a longitudinally extended magnetron, wherein the gas guide arrangement is provided with a binary structure having gas distribution system is ally through the at least one gas source having a plurality of gas outlet openings, which open into a vacuum chamber, wherein a structural member (6) is arranged, which has a in the direction of the elongated magnetron (2) extending first planar surface (4), introduced into the surface of first recesses having a first binary structure and are sealed with a first cover plate (8), characterized in that (in the surface of the first planar surface 4) additional second or further recesses are introduced with a second or further binary structure, and that the construction element (6) extending to a (in the direction of the elongated magnetron 2) second planar surface (5), i n its surface more recesses introduced with a further binary structure, and sealed with a second cover plate (8).