LEARN MORE ABOUT MICRO ELECTRO MECHANICAL SYSTEM

Micro electro mechanical systems (MEMS) has been referred to as micro system technology of combining miniaturized mechanical elements, sensors, actuators and electronics. Its main applications include accelerometers, miniature robots, microengines, inertial sensors, micro- mirrors, optical scanners, transducers, pressure sensors and flow sensors. In present paper salient features and materials used for manufacturing of MEMS have been presented. Over and above, basic processes of fabrication and applications of MEMS have been highlighted in brief.