A status on components development for folded micro NMR gyro

This paper reports on status of components development for miniaturized nuclear magnetic resonance gyroscopes (micro-NMRG). The reported components are (1) coils to generate and control the magnetic field, demonstrating experimental magnetic field to current ratio of B/I=214.1 uT/A and resulting in an estimated magnetic field homogeneity of H=354ppm, (2) a micro-fabricated spherical cells demonstrating confined alkali metal and noble gas, (3) a heater to keep the alkali metal in the vapor state, showing the capability of heating the micro-cell up to 160 degrees C with 1.44W of power, (4) backbone structure with integrated reflectors, demonstrating the ability to preserve 90.9% of initial light polarization. The introduced design utilized glassblowing process on a wafer-level for fabricating miniaturized NMR cell and 3D-folded-MEMS approach for fabricating the coils, heaters, and reflectors. The field homogeneity of the introduced coil design is capable of achieving the transverse-relaxation time of T 2 =7.5s. The projected ARW of the current design of micro-NMRG is 0.1 deg/rt-hr