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Tailored Voltage Waveforms in an SF6/O2 discharge: slope asymmetry and its effect on surface nanotexturing of silicon
Tailored Voltage Waveforms in an SF6/O2 discharge: slope asymmetry and its effect on surface nanotexturing of silicon
2016
Guillaume Fischer
Etienne Drahi
G. Poulain
Bastien Bruneau
Erik V. Johnson
Keywords:
Waveform
Voltage
Asymmetry
Materials science
Silicon
Electronic engineering
Optoelectronics
Correction
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