Ta-Si-O-N系薄膜発熱抵抗体の開発

The resistivity of the resistor in thermal inkjet printers is generally less than 1mΩcm. Thin-film Ta-Si-O-N resistor heaters with high resistivity have been developed. The thin Ta-Si-O-N films can be created with specific compositions to give resistivities ranging from 4 to 13 mΩcm, and show high resistance to cavitation damage. The atomic density and resistivity of these thin Ta-Si-O-N films were higher than those observed thin Ta-Si-O films.